Die maskenlosen Lithographietechniken bieten im Vergleich zur herkömmlichen maskenbasierten Lithografie einen wesentlich flexibleren Ansatz. Sie ermöglicht daher die wirtschaftliche Herstellung kleinerer Produktserien und einzelner Prototypen. Mit dem Ziel diese Flexibilität noch weiter auszubauen, beschäftigt…
When using an optical profiler to measure rough surfaces, especially surfaces generated by metal additive manufacturing, topographical artifacts such as spikes on a reconstructed surface are nearly unavoidable. These may affect the determination of roughness parameters of the topography and lead to erroneous…
Although optical 3D topography measurement instruments are widespread, measured profiles suffer from systematic deviations occurring due to the wave characteristics of light. These deviations can be analyzed by numerical simulations. We present a 3D modeling of the image formation of confocal microscopes.…
Commercial off-the-shelf digital projection systems are commonly used in active structured illumination photogrammetry of macro-scale surfaces due to their relatively low cost, accessibility, and ease of use. They can be described as inverse pinhole modelled. The calibration pipeline of a 3D sensor utilizing…
In dieser Arbeit werden Entwicklungen und Untersuchungen zum Direct Laser Writing, einem maskenlosen lithografischen Bearbeitungsprozess, vorgestellt. Diese hochauflösende lasergestützte Strukturierungstechnik wird mit einer am Institut für Prozessmess- und Sensortechnik entwickelten Nanopositionier-…
Modern industrial fabrication processes put high requirements on the quality of the surface form of precision-machined components, e.g. optical lenses or microelectromechanical systems (MEMS). Optical sensors provide high precision non-contact surface measurement to verify these quality requirements,…
The precise acquisition of three-dimensional geometrical data in micro- and nanotechnology is crucial for advanced fabrication processes. Scanning white-light interferometry (SWLI) achieves nanometer resolution in the axial direction, but the lateral resolution is far more critical. The requirements…