Mask-less lithography techniques offer a vastly more flexible approach compared to conventional mask-based lithography. It therefore allows the economical manufacturing of smaller product series and single prototypes. With the objective to expand this trait even further, this thesis deals with the realization…
When using an optical profiler to measure rough surfaces, especially surfaces generated by metal additive manufacturing, topographical artifacts such as spikes on a reconstructed surface are nearly unavoidable. These may affect the determination of roughness parameters of the topography and lead to erroneous…
Although optical 3D topography measurement instruments are widespread, measured profiles suffer from systematic deviations occurring due to the wave characteristics of light. These deviations can be analyzed by numerical simulations. We present a 3D modeling of the image formation of confocal microscopes.…
Commercial off-the-shelf digital projection systems are commonly used in active structured illumination photogrammetry of macro-scale surfaces due to their relatively low cost, accessibility, and ease of use. They can be described as inverse pinhole modelled. The calibration pipeline of a 3D sensor utilizing…
This thesis presents developments and investigations concerning Direct Laser Writing, a maskless lithographic process. This high-resolution, laser-based structuring technique is combined with a nanopositioning and nanomeasuring machine developed at the Institute for process measurement and sensor technology,…
Modern industrial fabrication processes put high requirements on the quality of the surface form of precision-machined components, e.g. optical lenses or microelectromechanical systems (MEMS). Optical sensors provide high precision non-contact surface measurement to verify these quality requirements,…
The precise acquisition of three-dimensional geometrical data in micro- and nanotechnology is crucial for advanced fabrication processes. Scanning white-light interferometry (SWLI) achieves nanometer resolution in the axial direction, but the lateral resolution is far more critical. The requirements…