Characteristics of a monolithically integrated micro-displacement sensor

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Takeshita, T., Peng, Y., Morita, N., Ando, H., Higurashi, E., Sawada, R., 2011. Characteristics of a monolithically integrated micro-displacement sensor. Proceedings of the 14th Joint International IMEKO TC1 + TC7 + TC 13 Symposium.
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