Characteristics of a monolithically integrated micro-displacement sensor

Category

Conference:

Joint International IMEKO TC1 + TC7 + TC 13 Symposium Intelligent Quality Measurements - Theory, Education and Training; 14 (Jena) ; 2011.08.31-09.02

Publisher:

GND

16003365-2

ilmedia

Published in:

Proceedings of the 14th Joint International IMEKO TC1 + TC7 + TC 13 Symposium : "Intelligent quality measurements - theory,…
Vol. 56, 2011 (06.12.2011)

Volume:

56, 2011

Date Created:

06.12.2011

Date Issued:

06.12.2011

PPN:

682193259

URN:

urn:nbn:de:gbv:ilm1-2011imeko-015:6

Language:

English

Type of Resource:

Text

Extent:

6 Seiten

Place Term:

Ilmenau

Classification:

Klasse A

Classification:

für Harvesting bereitgestellt

Classification:

Thüringer Pflichtexemplare

DDC subject of DNB:

620 Engineering & allied operations

Hosting institution:

Technische Universität Ilmenau, Fakultät für Maschinenbau