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Sensitivity improvement to active piezoresistive AFM probes using focused...

aus: Sensors
This paper presents a comprehensive modeling and experimental verification of active piezoresistive atomic force microscopy (AFM) cantilevers, which are the technology enabling high-resolution and high-speed surface measurements. The mechanical structure of the cantilevers integrating Wheatstone piezoresistive...
Basel: MDPI, 2019-10-12