This study presents a comprehensive and systematic investigation of the deposition and patterning of hydrogenated amorphous silicon carbide (a-SiC:H) using advanced plasma-based techniques to precisely tailor its optical characteristics for micro-optical applications. We demonstrate the ability to adjust…
Whispering gallery mode resonatoren werden für eine Vielzahl unterschiedlicher Anwendungen in der Industrie und im akademischen Bereich eingesetzt. Die Arbeit mit WGM ist mit Hürden wie die Herstellung, Charakterisierung und Anregung verbunden. Das Ziel dieser Arbeit ist es, neue Konzepte vorzustellen,…
We present a systematic investigation of an SiO2 etching process using a standard fluorocarbon chemistry ICP-RIE etch tool with a cryogenically cooled electrode. Our goal is to enable the control of the SiO2 feature morphology, i.e., the sidewall angle, in order to add a degree of freedom for the design…
Polarizing beamsplitters have numerous applications in optical systems, such as systems for freeform surface metrology. They are classically manufactured from birefringent materials or with stacks of dielectric coatings. We present a binary subwavelength-structured form-birefringent diffraction grating,…
Subwavelength-structures with different fill factors in the lateral dimensions result in unique phase shifts for the different polarization states of transmitted light.By using this additional degree of freedom for diffractive optical elements, we yield additional functionalities for compact optical…
Optical Microcavities are established model systems for non-linear dynamics. This motivates their description in phase space using Husimi-Functions, which give insight into the main radiation directions and the mode distribution at the dielectric interface. In this work, we generalize the application…