3D printing down to the nanoscale remains a significant challenge. In this paper, the study explores the use of scanning probes that emit low-energy electrons (<100 eV) coupled with the localized injection and electron-induced decomposition of precursor molecules, for the precise localized deposition…
Photosensitive glasses for radiation-induced 3D microstructuring, due to their optical transparency and thermal, mechanical, and chemical resistance, enable the use of new strategies for numerous microscale applications, ranging from optics to biomedical systems. In this context, we investigated the…
Miniaturized on-chip micropumps with no moving parts are intriguing components for advanced lab-on-chip systems. Magnetohydrodynamic pumping is one possibility but requires further research with respect to microsystems design and fabrication. In this paper, the design and fabrication of a magnetohydrodynamic…
Ultralow expansion (ULE) glasses are of special interest for temperature stabilized systems for example in precision metrology. Nowadays, ULE materials are mainly used in macroscopic and less in micromechanical systems. Reasons for this are a lack of technologies for parallel fabricating high-quality…
Deep etching of glass and glass ceramics is far more challenging than silicon etching. For thermally insensitive microelectromechanical and microoptical systems, zero-expansion materials such as Zerodur or ultralow expansion (ULE) glass are intriguing. In contrast to Zerodur that exhibits a complex glass…
A new type of a specifically tailored resist for Soft Nanoimprint Lithography (Soft UV-NIL) namely mr-NIL213FC has been developed. It aims for a significant improvement of its etch-resistance with regard to underlying oxide substrates such as glass. This work demonstrates the first study of its imprint…
Mit einem thermischen Ausdehnungskoeffizienten von nahe 0 im Temperaturbereich von 0. . . 50 °C wird Zerodur vielfach für temperaturstabilisierte Systeme eingesetzt. Da es an Untersuchungen und Ergebnissen zu Batch-kompatiblen Mikrostrukturierungsverfahren mit hoher Genauigkeit fehlt, ist dessen Einsatz…