This study presents a comprehensive and systematic investigation of the deposition and patterning of hydrogenated amorphous silicon carbide (a-SiC:H) using advanced plasma-based techniques to precisely tailor its optical characteristics for micro-optical applications. We demonstrate the ability to adjust…
Nano-structuring enables us to add additional degrees of freedom to the design of optical elements. Especially the possibility of controlling the polarization is of great interest in the field of nano-structured optics. For being able to exploit the whole range of form-birefringent phase shifts, the…
Polarizing beamsplitters have numerous applications in optical systems, such as systems for freeform surface metrology. They are classically manufactured from birefringent materials or with stacks of dielectric coatings. We present a binary subwavelength-structured form-birefringent diffraction grating,…
Subwavelength-structures with different fill factors in the lateral dimensions result in unique phase shifts for the different polarization states of transmitted light.By using this additional degree of freedom for diffractive optical elements, we yield additional functionalities for compact optical…