In this contribution, we propose a diode laser stabilized to an ultrastable cavity (ORS) as a metrology laser for interferometry in nanopositioning and measuring machines (NPMM) with measurement ranges up to 1 m. Based on a time-dependent linewidth analysis of frequency-stabilized He-Ne-lasers traditionally…
Since the turn of the millennium, the development and commercial availability of optical frequency combs has led to a steadily increase of worldwide installed frequency combs and a growing interest in using them for industrial-related metrology applications. Especially, GPS-referenced frequency combs…
Dieser Beitrag beschäftigt sich mit der Analyse der Positioniergenauigkeit einer neuen Nano-Fabrikationsmaschine. Diese Maschine verwendet ein planares Direktantriebssystem und hat einen Positionierbereich von 100 mm im Durchmesser. Die Positioniergenauigkeit wurde in verschiedenen Bewegungsszenarien…
Optical based non-contact measurement techniques are of great importance in semiconductor device characterization. THz emission from optically excited semiconductor interfaces permits the investigation of transport mechanisms and potential barriers at semiconductor interfaces. So far most available studies…
Nanopositioning and nanomeasuring machines (NPM-machines), developed at Technische Universität Ilmenau, have provided high-precision measurement and positioning of objects across ten decades, from 20 pm resolution up to 200 mm measuring range. They work on the basis of the error-minimal, extended six…