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N – K edge NEXAFS study of the defects induced by indium implantation in GaN

N – K edge near edge X-ray absorption fine structure (NEXAFS) spectroscopy is applied in order to determine implantation-induced changes in the electronic structure of GaN. The samples were implanted with 700 keV In ions and fluencies in the range 5×10 13 – 1 × 10 16 ions/cm 2 . The NEXAFS results are…
Bristol: IOP Publ., 2009-11-01