The manufacturing process for diffraction gratings based on interference lithography results at first in a resist surface relief pattern. However, the majority of applications demand grating structures in the inorganic substrate material itself. Commonly, a modification of the grating
profile with regard…
Die physikalisch-optischen Randbedingungen beim Einsatz von Beugungsgittern im Wellenlängen-Bereich um 13,5nm bedingen einen großen Einfallswinkel. Die gebeugte Strahlung hinter einem solchen Grazing-Incidence-Gitter wird dabei an einer wesentlich größeren Fläche umgelenkt, als dies bei üblichen Anwendungen…
Blazed gratings are in general the best choice for achieving the maximal diffraction efficiencies in a moderate wide wavelength band. However, a number of applications such as typical spectrometer systems need a broader spectral range. Here the drop of diffraction efficiency for the employed order towards…