In this proceeding a new approach for the description of geometric-real threads will be given. The holistic determination of the virtual pitch diameter depends on the whole thread scanning. For this purpose, the optical focus variation system, consisting of a microscope objective and a digital camera,...
Areal 3D scanners based on structured light projection are widely used for inspection tasks in manufacturing processes. For accurate measurements of object geometries, common structured light sensors project a sequence of periodic patterns onto the surface. By subsequent evaluation of these patterns,...
The functionalities and properties of components strongly correlate to the used material’s structure and the microstructure of the surface. Therefore, by characterizing the structure of a material or surface information is indirectly gained on its properties. In this work porous aluminum oxide surface...
With the industrial development and the advances in micro - displacement technology, the demands on piezo transducers are increasing. For piezo transducers, the error inspections of the non-linearity and the hysteresis are necessary procedure before piezo transducers utilized. Due to the possible decline...
Independently of the component used to introduce a divergence angle between the two probing beams of straightness interferometers, their uncertainty is limited by three main errors linked to each other: their resolution, the influence of refractive index gradients and the topography of the straightness...
In nano precision technology, actuating along the vertical axis is a special challenge because of the permanent gravitational force. In this paper, the development of an integrated guiding and actuation element for the vertical motion is presented.
A pneumatic-cylinder-like setup is used with its pressure...
Modern industrial fabrication processes put high requirements on the quality of the surface form of precision-machined components, e.g. optical lenses or microelectromechanical systems (MEMS). Optical sensors provide high precision non-contact surface measurement to verify these quality requirements,...
Existing long range nanopositioning and nanomeasuring machines are based on three independent linear movements in three rectangular axes. This in combination with the specific nature of optical and mechanical sensors and tools limits the application of those machines in terms of addressable part geometries....
This paper presents a new method for measurement of a focused laser beam diameter by using a single cell photodiode (PD) for achievement of further higher measurement sensitivity of an optical angle sensor based on laser autocollimation. The proposed method referred to as the PD edge method utilizes...
Slope measuring deflectometry allows the non-contact measuring of curves surfaces like ultra-precise elliptical cylinder shaped mirrors in use for the focusing of Synchrotron light. This paper will report on the measurement of synchrotron mirrors designed to guide and focus
Synchrotron light in the...