13 documents found

Proceedings
2013-04-03

Low coherent Linnik interferometer optimized for use in Nano Measuring...

The precise acquisition of three-dimensional geometrical data in micro- and nanotechnology is crucial for advanced fabrication processes. Scanning white-light interferometry (SWLI) achieves nanometer resolution in the axial direction, but the lateral resolution is far more critical. The requirements...
Proceedings
2013-04-03

Vacuum transfer system for loading the Sartorius prototype mass comparator...

The Vacuum Transfer System (VTS) is designed for fully automatic loading of weights into the Sartorius Prototype Mass Comparator CCL1007. The system enables the user to transfer weights from air to air/neutral gas, air to vacuum and back, as well as from vacuum to vacuum conditions. A detailed description...
Proceedings
2013-04-03

Precision and low cost position detection using capacitive sensor technology

In the wide application range of measurement, position detection is common ndispensable. Beside pure position detection it is also used for force transducers and precision balances. Using the example of a scale, which depends on the electromagnetic force compensation principle (EMC-scale, cf. [1]),...
Proceedings
2013-04-03

A novel algorithm for the signal interpolation of the displacement measurement...

Current commercial interferometers reveal excellent measurement performances, because of its major advantage which enables the displacement measurement with the characterization of the high resolution under the large measuring range. Fabry-Perot interferometer is a compact interferometer with the structure...
Article / Chapter
CC BY 3.0
2013-04-03

Spatially explicit regionalization of airborne flux measurements using...

The goal of this study is to characterize the sensible (H) and latent (LE) heat exchange for different land covers in the heterogeneous steppe landscape of the Xilin River catchment, Inner Mongolia, China. Eddy-covariance flux measurements at 50–100 m above ground were conducted in July 2009 using a...
Katlenburg-Lindau: Copernicus, 2013-04-03

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