4 documents found

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2009-04-28

Allgemeines

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CC BY-NC-SA 3.0
2009-04-28

Development of 3D force sensors for nanopositioning and nanomeasuring machine

aus: Sensors
In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic...
Ilmenau: ilmedia, 2009-04-28

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