000K  utf8
0100  269538232
1100  $c1983
1500  eng
3110  American Vacuum Society, 1953 - ; ID: gnd/867-9
4000  Journal of vacuum science & technology : JVST ; the official journal of the American Vacuum Society / publ. by the American Institute of Physics. A, Vacuum, surfaces, & films$hInst.
4030  New York, NY$nInst.
4060  Online-Ressource
4200  Journal of vacuum science & technology / A
4200  Journal of vacuum science and technology
4200  JVST
4961  http://uri.gbv.de/document/gvk:ppn:269538232
5051  530
5550  Epitaxie
5550  Oberflächenphysik
5550  Vakuumphysik
5550  Vakuumtechnik