@Article{dbt_mods_00067093,
  title = 	{Journal of vacuum science {\&} technology : JVST ; the official journal of the American Vacuum Society / publ. by the American Institute of Physics. A, Vacuum, surfaces, {\&} films},
  year = 	{1983},
  publisher = 	{Inst.},
  address = 	{New York, NY},
  keywords = 	{Epitaxie; Oberfl{\"a}chenphysik; Vakuumphysik; Vakuumtechnik},
  issn = 	{1520-8559},
  url = 	{https://www.db-thueringen.de/receive/dbt_mods_00067093},
  url = 	{https://ezb.ur.de/?1475424-1},
  url = 	{https://pubs.aip.org/avs/jva},
  url = 	{http://uri.gbv.de/document/gvk:ppn:269538232},
  language = 	{en}
}