nam 22 uu 4500 dbt_mods_00060829 10.1088/1361-6501/acb6e1 doi dbt_mods_00060829 ger DE-601 rda eng 2024-05-02 600 sdnb 620 sdnb Dai, Gaoliang Author aut A feasibility study towards traceable calibration of size and form of microspheres by stitching AFM images using ICP point-to-plane algorithm Dai, Gaoliang;Degenhardt, Johannes;Hu, Xiukun;Wolff, Helmut;Tutsch, Rainer;Manske, Eberhard (2024-05-02) 2023-02-09 13 Seiten text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier We present a new method for traceable calibration of size and form error of microspheres, which was realised by stitching a series of atomic force microscopic (AFM) images measured at different orientations of microspheres using the metrological large range AFM of the PTB. The stitching algorithm is achieved using an iterative closest point point-to-plane algorithm. As the AFM tip geometry is one of the most significant error sources for the developed method, it was traceably calibrated to a line width standard (type IVPS100-PTB), whose feature geometry was calibrated with a traceable route to the lattice constant of crystal silicon. Measurement setup, scan strategy, and data evaluation processes have been detailed in the paper. Measurement results show high stability and robustness of the developed method. For instance, the standard deviation of four repeated measurements reaches 5 nm, indicating promising performance. microsphere k10plus_field_6500 calibration k10plus_field_6500 micro coordinate measuring machine k10plus_field_6500 atomic force microscopy k10plus_field_6500 iterative closest point algorithm data fusion article Degenhardt, Johannes Author aut Hu, Xiukun Author aut Wolff, Helmut Author aut Tutsch, Rainer 1959 - Author aut (DE-588)172488176 Manske, Eberhard 1956 - Author aut (DE-588)132799448 Technische Universität Ilmenau Fakultät für Maschinenbau host institution his 202300000340005999 34:5:055009<1 Measurement science and technology 1361-6501 dbt_mods_00039281 https://www.db-thueringen.de/receive/dbt_mods_00060829 object in context https://www.db-thueringen.de/servlets/MCRFileNodeServlet/dbt_derivate_00063299/1361-6501_34_2023_5_55009.pdf raw object https://www.db-thueringen.de/rsc/thumbnail/dbt_mods_00060829.png preview http://uri.gbv.de/document/gvk:ppn:1835081983 uri