@Article{dbt_mods_00059629,
  author = 	{Weigel, Christoph
		and Cherkasova, Valeriya
		and Holz, Mathias
		and Phi, Hai Binh
		and G{\"o}rner Tenorio, Christian
		and Wilbertz, Bj{\"o}rn
		and Vo{\ss}grag, Leonard
		and Fr{\"o}hlich, Thomas
		and Strehle, Steffen},
  title = 	{Ultralow expansion glass as material for advanced micromechanical systems},
  journal = 	{Advanced engineering materials},
  year = 	{2023},
  month = 	{Feb},
  day = 	{11},
  publisher = 	{Wiley-VCH Verl.},
  address = 	{Weinheim},
  volume = 	{25},
  number = 	{9},
  pages = 	{1--14},
  keywords = 	{cantilever; glass-based microsystems; microelectromechanical systems (MEMS); precision measurement; reactive ion etching; ultralow expansion glass; Hochleistungswerkstoff},
  abstract = 	{Ultralow expansion (ULE) glasses are of special interest for temperature stabilized systems for example in precision metrology. Nowadays, ULE materials are mainly used in macroscopic and less in micromechanical systems. Reasons for this are a lack of technologies for parallel fabricating high-quality released microstructures with a high accuracy. As a result, there is a high demand in transferring these materials into miniaturized application examples, realistic system modeling, and the investigation of microscopic material properties. Herein, a technological base for fabricating released micromechanical structures and systems with a structure height above 100 $\mu$m in ULE 7972 glass is established. Herein, the main fabrication parameters that are important for the system design and contribute thus to the introduction of titanium silicate as material for glass-based micromechanical systems are discussed. To study the mechanical properties in combination with respective simulation models, microcantilevers are used as basic mechanical elements to evaluate technological parameters and other impact factors. The implemented models allow to predict the micromechanical system properties with a deviation of only {\textpm}5{\%} and can thus effectively support the micromechanical system design in an early stage of development.},
  note = 	{1.1999 -},
  note = 	{Ab 3.2001 ungez{\"a}hlte Beil.: DGM aktuell},
  issn = 	{1527-2648},
  doi = 	{10.1002/adem.202201873},
  url = 	{https://www.db-thueringen.de/receive/dbt_mods_00059629},
  url = 	{http://uri.gbv.de/document/gvk:ppn:1837653232},
  url = 	{http://uri.gbv.de/document/gvk:ppn:319660966},
  url = 	{https://doi.org/10.1002/adem.202201873},
  url = 	{https://doi.org/10.1002/(ISSN)1527-2648},
  file = 	{:https://www.db-thueringen.de/servlets/MCRFileNodeServlet/dbt_derivate_00070770/1527-2648_25_2023_9_1-14.pdf:PDF},
  language = 	{en}
}