Monolithic compliant mechanism for an EMFC mass comparator weighing cell

Mass comparator weighing cells based on electromagnetic force compensation (EMFC) find application in the most demanding force and mass measurement applications. The centerpiece of these devices is a highly sensitive compliant mechanism with thin flexure hinges. The compliant mechanism forms the mechanical part of the mechatronic overall system. A novel mechanism based on an advanced adjustment concept has been developed, manufactured, and experimentally investigated. The adjustment is designed to further reduce the measurement uncertainty for mass comparisons by canceling out first-order error components. The focus is on the mechanical properties: stiffness, tilt sensitivity, and off-center load sensitivity. The elastic stiffness of the compliant mechanism is compensated by introducing a negative gravitational stiffness to enable the compensation of manufacturing deviations and to increase mass resolution.