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Recent progress and challenges in AFM-based true-3D micro and nanometrology

In this paper, challenges of true-3D nanometrology are discussed on four fundamental aspects:
probing sensor, measurement strategy, tip geometry and structure/tip deformation. Our research progress addressing these challenges is introduced.

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Conference:
Ilmenau Scientific Colloquium. Technische Universität Ilmenau ; 60 (Ilmenau) : 2023.09.04-08
Publisher:
GND
16003365-2
ilmedia
Published in:
Engineering for a changing world : Proceedings : 60th ISC, Ilmenau Scientific Colloquium, Technische Universität Ilmenau,…
(01.11.2023)Art.-No.:1.1.095
Date Issued:
01.11.2023
DOI:
10.22032/dbt.58681
URN:
urn:nbn:de:gbv:ilm1-2023isc-095:8
Language:
English
Type of Resource:
Text
Extent:
6 Seiten
Place Term:
Ilmenau
DDC subject of DNB:
620 Engineering & allied operations
Hosting institution:
Technische Universität Ilmenau, Fakultät für Maschinenbau

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