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A Model Surface for Calculating the Reflectance of Smooth and Rough Aluminum Layers in the Vacuum Ultraviolet Spectral Range

Affiliation
Institute of Applied Physics, Friedrich-Schiller-University, Max-Wien-Platz 1, 07743 Jena, Germany
Stenzel, Olaf;
Affiliation
Department Functional Surfaces and Coatings, Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745 Jena, Germany
Wilbrandt, Steffen;
Affiliation
Institute of Applied Physics, Friedrich-Schiller-University, Max-Wien-Platz 1, 07743 Jena, Germany
He, Jian-Ying;
GND
1238048552
Affiliation
Institute of Applied Physics, Friedrich-Schiller-University, Max-Wien-Platz 1, 07743 Jena, Germany
Stempfhuber, Sven;
Affiliation
Department Functional Surfaces and Coatings, Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745 Jena, Germany
Schröder, Sven;
GND
113119321
Affiliation
Institute of Applied Physics, Friedrich-Schiller-University, Max-Wien-Platz 1, 07743 Jena, Germany
Tünnermann, Andreas

We present a systematic approach to calculating the reflectance of aluminum thin films. In our approach, the rough aluminum surface is modelled as a square array of submicrometer-sized oblate cylinders. The focus of the study is on the vacuum ultraviolet (VUV) spectral range, with wavelengths ranging from 120 nm to 200 nm. The VUV reflectance of aluminum films is calculated by using the rigorous coupled wave approach in order to take the surface roughness of aluminum into account. The modelled reflectance spectra are compared to experimental data from unprotected and protected aluminum films.

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Editor:
Botas, Alexandre
Published in:
Coatings : open access journal
Vol. 13, No. 1 (09.01.2023)Art.-No.:122, p. 1-15
Volume:
13
No.:
1
Date Issued:
09.01.2023
URN:
urn:nbn:de:gbv:27-dbt-20230203-195416-006
DOI:
10.3390/coatings13010122
Language:
English
Type of Resource:
Text
Extent:
15 Seiten
Keywords:
  1. aluminum
    Typ
    Schlagwort
  1. vacuum ultraviolet
    Typ
    Schlagwort
  1. reflectance
    Typ
    Schlagwort
  1. surface roughness
    Typ
    Schlagwort
  1. absorption
    Typ
    Schlagwort
  1. protected mirror
    Typ
    Schlagwort
  1. magnesium fluoride
    Typ
    Schlagwort
DDC subject of DNB:
660 Chemical engineering
Hosting institution:
Friedrich-Schiller-Universität Jena, Physikalisch-Astronomische Fakultät
note:
Zweitveröffentlichung

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License Holder: © 2023 by the authors.

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