For the characterization of the mechanical deformation of materials at microscopic length scales, image processing of a high-quality surface pattern was used. We imprinted speckle patterns onto a thin polymer film attached to the surface of flat and curved metal substrates using flexible molds and soft-thermal nanoimprint lithography. High optical contrast was achieved by mixing black dye into the film generating high absorption in the elevated structures, and by adding titania nanoparticles as fillers to the recessed areas to induce diffuse scattering. For accessing resolution suitable to detect deformation at an individual grain level, the structure sizes were scaled down from 20 μm to 2 μm. For both structure sizes imaging was tested using a digital image correlation setup, that enables 3D imaging of samples with angles of up to 10° of inclination.