Spectrophotometric Characterization of Thin Semi-Transparent Aluminum Films Prepared by Electron Beam Evaporation and Magnetron Sputtering

Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Wilbrandt, Steffen;
GND
112650775
Affiliation
Abbe School of Photonics, Friedrich-Schiller-University Jena, Albert-Einstein-Str. 6, 07745 Jena, Germany
Stenzel, Olaf;
Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Liaf, Abrar;
Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Munzert, Peter;
Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Schwinde, Stefan;
GND
1238048552
Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Stempfhuber, Sven;
Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Felde, Nadja;
Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Trost, Marcus;
Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Seifert, Tina;
Affiliation
Fraunhofer Institute of Applied Optics and Precision Engineering IOF, Albert-Einstein Str. 7, 07745 Jena, Germany
Schröder, Sven

Aluminum thin films with thicknesses between approximately 10 and 60 nm have been deposited by evaporation and sputtering techniques. Layer characterization focused on reflectance, optical constants, and surface quality. Reflectance fits have been performed using a merger of three standard dispersion models, namely the Drude model, the Lorentzian oscillator model, and the beta-distributed oscillator model. A thickness dependence of the optical constants could be established in the investigated thickness range.

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