Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes

Category

Published in:

Journal of micromechanics and microengineering
Vol. 31, 2021, No. 5 (13.04.2021)Art.-No.:055010

Volume:

31, 2021

No.:

5

Date Created:

31.01.2022

Date Issued:

13.04.2021

DOI:

10.1088/1361-6439/abf332

PPN:

1755597622

Language:

English

Type of Resource:

Text

Extent:

11 Seiten

Keywords:

nanowire; silicon; AFM; soft probe; microfabrication; nanowire alignment

DDC subject of DNB:

530 Physics

Hosting institution:

Technische Universität Ilmenau, Fakultät für Maschinenbau