000K utf8 0100 1700644726 0500 Ou 1100 2020$c2020-05-25 1500 eng 2051 10.1088/1361-6501/ab848c 2240 3000 Manske, Eberhard 3010 Blumröder, Ulrike 3010 Dontsov, Denis 3010 Fröhlich, Thomas 3010 Füßl, Roland 3010 Köchert, Paul 3010 Kühnel, Michael 3010 Mastylo, Rostyslav 3010 Ortlepp, Ingo 4000 Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision [Manske, Eberhard] 4060 8 Seiten 4209 Nanopositioning and nanomeasuring machines (NPM-machines), developed at Technische Universität Ilmenau, have provided high-precision measurement and positioning of objects across ten decades, from 20 pm resolution up to 200 mm measuring range. They work on the basis of the error-minimal, extended six degrees of freedom Abbe-comparator principle, with high-precision fibre-coupled laser interferometers and optical or atomic force probes. These machines are suitable not only for measuring but also for positioning with an outstanding sub-nanometre performance. Measurements on precision step heights up to 5 mm show a repeatability of 20 pm. Consecutive step positioning of 80 pm can be demonstrated. With the new approach of an atomic clock-stabilized He–Ne-laser via a high-stable-frequency comb, we achieve a frequency stability of less than 300 Hz, respectively 0.6 ċ 10−12 relative frequency stability within 1 h at an integration time of 1 s. For the first time, we can demonstrate a direct, permanent and unbroken chain of traceability between the laser interferometric measurement within an NPM-machine and a GPS satellite-based atomic clock. This paper presents a closer insight into the scientific and metrological background as well as unrivalled measurement results, and discusses the great possibilities of this new technology. 4950 https://doi.org/10.1088/1361-6501/ab848c$xR$3Volltext$534 4961 http://uri.gbv.de/document/gvk:ppn:1700644726 5051 600 5051 620 5550 frequency comb 5550 laser interferometer 5550 nanometrology 5550 nanopositioning and nanomeasuring machine