@Article{dbt_mods_00044929, author = {Sevillano-Bendez{\'u}, Miguel {\'A}ngel and Dulanto, Jorge A. and Conde, L.A. and Grieseler, Rolf and Guerra, Jorge A. and T{\"o}fflinger, Jan Amaru and {Peruvian Workshop on Solar Energy (JOPES) ; (Lima) : 2019.05.08-10}}, title = {Capacitance voltage curve simulations for different passivation parameters of dielectric layers on silicon}, journal = {Journal of physics: Conference Series}, year = {2020}, month = {Jan}, day = {01}, publisher = {IOP Publ.}, address = {Bristol}, volume = {1433, 2020}, pages = {art. 012007}, abstract = {Surface passivation is a widely used technique to reduce the recombination losses at the semiconductor surface. The passivating layer performance can be mainly characterized by two parameters: The fixed charge density (Q ox) and the interface trap density (D it) which can be extracted from Capacitance-Voltage measurements (CV). In this paper, simulations of High-Frequency Capacitance-Voltage (HF-CV) curves were developed using simulated passivation parameters in order to examine the reliability of measured results. The D it was modelled by two different sets of functions: First, the sum of Gaussian functions representing different dangling bond types and exponential tails for strained bonds. Second, a simpler U-shape model represented by the sum of exponential tails and a constant value function was employed. These simulations were validated using experimental measurements of a reference sample based on silicon dioxide on crystalline silicon (SiO2/c-Si). Additionally, a fitting process of HF-CV curves was proposed using the simple U-shape D it model. A relative error of less than 0.4{\%} was found comparing the average values between the approximated and the experimentally extracted D it's. The constant function of the approximated D it represents an average of the experimentally extracted D it for values around the midgap energy where the recombination efficiency is highest.}, note = {1.2004 -}, issn = {1742-6596}, doi = {10.1088/1742-6596/1433/1/012007}, url = {https://www.db-thueringen.de/receive/dbt_mods_00044929}, url = {http://uri.gbv.de/document/gvk:ppn:1688980253}, url = {http://uri.gbv.de/document/gvk:ppn:470957794}, url = {https://doi.org/10.1088/1742-6596/1433/1/012007}, file = {:https://www.db-thueringen.de/servlets/MCRFileNodeServlet/dbt_derivate_00049941/1742-6596_1433_2020_012007.pdf:PDF}, language = {en} }