Design, modeling, and characterization of a bionically inspired integrated micro-flapper for cooling and venting applications

Behlert, Regine; Gehring, Matthias; Mehner, Hannes GND; Wieland, Robert; Schrag, Gabriele GND

A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic analyses. The results of the investigations prove that an undulatory motion of the fin-like micro-flapper yields a significant higher, directed fluidic net flow compared to resonant-like motion. First prototypes have been manufactured and characterized applying laser Doppler vibrometry (LDV).


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