Microsystem in LTCC technology for measurements of gas concentration in a sub-ppm range
Commonly used substrates for resistance-type oxide sensors are mainly alumina plates. Other types of ceramics, e.g. based on Low Temperature Cofired Ceramics (LTCC) technology could also be used for this purpose. This technology is well established and enables a creation of 3D structures with channels and cavities that can be formed inside a LTCC micromodule. The work describes manufacturing of the microsystem containing a gas preconcentration chamber and sensor substrates with improved thermal properties, all fabricated in LTCC technology.