MEMS gas ionization sensor with palladium nanostructures for use at ambient pressure

Müller, Lutz; Mehner, Hannes; Hoffmann, Martin GND

A microfabricated gas ionization sensor with integrated field enhancing silicon- palladium nanostructures is presented. The sensor can be used to determine the ambient gas by its specific breakdown voltage. Technological details of the fabrication and the assembly of the sensor are presented too.

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Müller, Lutz / Mehner, Hannes / Hoffmann, Martin: MEMS gas ionization sensor with palladium nanostructures for use at ambient pressure. Ilmenau 2016. ilmedia.

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