High precision optical step detection

Schuppich, Juliane; Kampmann, Ronald GND; Sinzinger, Stefan GND; Mastylo, Rostyslav GND; Manske, Eberhard GND

For a high precision positioning and measurement system high accuracy detection of surface specific profiles such as steps or edges is required. The interaction of light with microscopic structures results in typical diffraction pattern which contain information about the 3D-profile. In this work we investigate these diffraction images in view of wavelength and position dependence.

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Schuppich, Juliane / Kampmann, Ronald / Sinzinger, Stefan / et al: High precision optical step detection. 2015.

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