000K  utf8
0100  803838808
1100  2014$c2014-11-17
1500  eng
2050  urn:nbn:de:gbv:ilm1-2014iwk-047:3
3000  Goj, Boris
3010  Bartsch, Heike
3010  Brokmann, Ulrike
3010  Müller, Jens
3010  Rädlein, Edda
4000  Thin-film capable ceramics for humidity and temperature sensing applications  [Goj, Boris]
4060  8 Seiten
4950  https://nbn-resolving.org/urn:nbn:de:gbv:ilm1-2014iwk-047:3$xR$3Volltext$534
4961  http://uri.gbv.de/document/gvk:ppn:803838808
5051  620
5550  humidity
5550  LTCC
5550  planarization
5550  sensor
5550  temperature
5550  thin film