PT Unknown
AU Goj Dr.-Ing., B
   Brokmann Dr. - Ing., U
   Bartsch, H
   Rädlein Univ.-Prof. Dr.-Ing. habil., E
   Müller Prof. Dr.-Ing., J
AU Ilmenau Scientific Colloquium. Technische Universität Ilmenau ; 58 (Ilmenau) : 2014.09.08-12
TI Thin-film capable ceramics for humidity and temperature sensing applications
SE Shaping the Future by Engineering: Proceedings ; 58th IWK, Ilmenau Scientific Colloquium, Technische Universität Ilmenau, 8 - 12 September 2014
PD November
PY 2014
BP Art. 1.2.8
VL 58, 2014
PU ilmedia
WP https://www.db-thueringen.de/receive/dbt_mods_00025051
LA en
DE thin film; planarization; LTCC; temperature; humidity; sensor; Feinwerktechnik; AAL-Technik; Maschinenbau; Mechatronik; Systemtechnik; Präzisionsmessung; Kongress; Ilmenau <2014>
AB Peer review process, carrried out by the members of the International Scientific Committee.
PI Ilmenau
ER