3D vibrating probe for measuring microfeatures with nanometer uncertainty

Category

Conference:

International Scientific Colloquium. Technische Universität Ilmenau, Faculty of Mechanical Engineering ; 56 (Ilmenau) : 2011.09.12-16

Publisher:

GND

16003365-2

ilmedia

Published in:

Innovation in Mechanical Engineering – Shaping the Future : proceedings ; 56. IWK 2011, 12 - 16 September 2011, Ilmenau,…
Vol. 56, 2011 (15.12.2011), Session 1.3

Volume:

56, 2011

Date Created:

15.12.2011

Date Issued:

15.12.2011

PPN:

684091151

URN:

urn:nbn:de:gbv:ilm1-2011iwk-139:2

Language:

English

Type of Resource:

Text

Extent:

5 Seiten

Place Term:

Ilmenau

Classification:

Klasse A

Classification:

56. IWK (2011)

Classification:

für Harvesting bereitgestellt

Classification:

Thüringer Pflichtexemplare

DDC subject of DNB:

620 Engineering & allied operations

Hosting institution:

Technische Universität Ilmenau, Fakultät für Maschinenbau