Homodyne interference signal demodulation for nanopositioning and nanomeasuring machines

Cite

Citation style:

Hausotte, Tino / Percle, Brandon / Gerhardt, Uwe / et al: Homodyne interference signal demodulation for nanopositioning and nanomeasuring machines. Ilmenau 2011.

Access Statistic

Total:
Downloads:
Abtractviews:
Last 12 Month:
Downloads:
Abtractviews:

open graphic

Rights

Use and reproduction:
All rights reserved

Export