Microscope objectives for semiconductor metrology: technology driver for the mounting technology of optical high performance systems with small diameters

Category

Conference:

Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau, Faculty of Mechanical Engineering ; 53 (Ilmenau) : 2008.09.08-12

Publisher:

GND

16003365-2

ilmedia

Published in:

Prospects in mechanical engineering : proceedings ; 53. IWK, Internationales Wissenschaftliches Kolloquium, 8 - 12 September…
Vol. 53, 2008 (02.05.2011), Session 5.1

Volume:

53, 2008

Date Created:

02.05.2011

Date Issued:

02.05.2011

PPN:

667735011

Language:

English

Type of Resource:

Text

Extent:

7 Seiten

Classification:

53. IWK (2008)

Classification:

Klasse A

Classification:

für Harvesting bereitgestellt

DDC subject of DNB:

620 Engineering & allied operations

Hosting institution:

Technische Universität Ilmenau, Fakultät für Maschinenbau