Batch-capable fabrication approach for a highly efficient miniaturized magnetic valve

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Dittrich Dipl.-Ing., L., Kallenbach Dr.-Ing., M., Bonitz, B., Mache Dipl. Ing., T., Hoffmann Univ.-Prof. Dr., M., Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau, F. of M.E., (Ilmenau), ., 2011. Batch-capable fabrication approach for a highly efficient miniaturized magnetic valve. Prospects in mechanical engineering: proceedings ; 53. IWK, Internationales Wissenschaftliches Kolloquium, 8 - 12 September 2008, Prospects in mechanical engineering: proceedings ; 53. IWK, Internationales Wissenschaftliches Kolloquium, 8 - 12 September 2008 53, 2008, Session,4.
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