Adhesive bonding of MEMS and MOEMS with support of substrate inherent functional structures : design of a fault-tolerant adhesive bonding technique for microsystem technology by use of component integrated micro structured bonding aids

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Wagner, Mario / Böhm, Stefan / Dilger, Klaus: Adhesive bonding of MEMS and MOEMS with support of substrate inherent functional structures. design of a fault-tolerant adhesive bonding technique for microsystem technology by use of component integrated micro structured bonding aids. Ilmenau 2011.

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