Group III-nitrides and 3C-SiC for micro- and nanoelectromechanical resonators

Cite

Citation style:
Förster, C., habil., C.P.Dr.-Ing., 2010. Group III-nitrides and 3C-SiC for micro- and nanoelectromechanical resonators. Maschinenbau von Makro bis Nano: 50. Internationales Wissenschaftliches Kolloquium, September, 19 - 23, 2005 ; proceedings, Maschinenbau von Makro bis Nano: 50. Internationales Wissenschaftliches Kolloquium, September, 19 - 23, 2005 ; proceedings 50, 2005, 4.
Could not load citation form. Default citation form is displayed.

Rights

Use and reproduction:
All rights reserved

Export