Deflection measurement of piezoelectric bending actuators with a combination of an integrated non-contact inductive sensor and high-accuracy electronic circuit

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Ballas, Rüdiger G. / Greiner, Paul F. / Schlaak, Helmut F.: Deflection measurement of piezoelectric bending actuators with a combination of an integrated non-contact inductive sensor and high-accuracy electronic circuit. 2010.

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