Micro and nano dimensional metrology on the basis of nano measuring machine

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Dai Dr., G., Pohlenz Mr., F., Internationales Wissenschaftliches Kolloquium (IWK). Technische Universität Ilmenau, (Ilmenau), ., 2010. Micro and nano dimensional metrology on the basis of nano measuring machine. Maschinenbau von Makro bis Nano: 50. Internationales Wissenschaftliches Kolloquium, September, 19 - 23, 2005 ; proceedings, Maschinenbau von Makro bis Nano: 50. Internationales Wissenschaftliches Kolloquium, September, 19 - 23, 2005 ; proceedings 50, 2005, 1.
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