Ultraprecision micromilling for the fabrication of monolithically integrated refractive microoptical systems

Stoebenau, Sebastian; Kleindienst, Roman; Sinzinger, Stefan GND

Different classes of optical elements combined in a monolithically integrated microoptical system are fabricated using micromilling. On the resulting surfaces the average roughness height was found to be Ra < 40 nm with an overall shape accuracy < 1.6 μm (based on the determination of the radii of curvature).

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Stoebenau, Sebastian / Kleindienst, Roman / Sinzinger, Stefan: Ultraprecision micromilling for the fabrication of monolithically integrated refractive microoptical systems. 2009.

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