Analysis of polishing errors from subaperture tools

Kelm, Andreas; Börret, Rainer; Sinzinger, Stefan GND

The polishing process of aspheric or freeform surfaces is normally implemented as a subaperture process with controlled movement of the tool. The use of different tools and controlling mechanisms may introduce errors. The errors related to the shape and the size of the tools and the influence of optimization algorithms is compared by using the 'Power Spectral Density' (PSD).

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Kelm, Andreas / Börret, Rainer / Sinzinger, Stefan: Analysis of polishing errors from subaperture tools. 2009.

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