High power RF and MF systems for sputter applications in flat panel display production

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Blattner, M., Ochs Dr., D., Rettich Dr., T., Wiedemuth Dr., P., Internationales Wissenschaftliches Kolloquium (IWK). Technische Universität Ilmenau, (Ilmenau), ., 2009. High power RF and MF systems for sputter applications in flat panel display production. Information technology and electrical engineering - devices and systems, materials and technologies for the future, Information technology and electrical engineering - devices and systems, materials and technologies for the future 51, 2006, Session,7.
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