An ultra-fast on-line microscopic optical quality assurance concept for small structures in an environment of mass production

Category

Conference:

Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau, Faculty of Computer Science and Automation ; 52 (Ilmenau) : 2007.09.10-13

Publisher:

ilmedia ^GND

Published in:

Computer science meets automation
Vol. 52, 2007, Vol. 2 (11.09.2007), p. 293-296

Volume:

52, 2007, Vol. 2

Date Created:

11.09.2007

Date Issued:

11.09.2007

PPN:

546147208

Language:

English

Type of Resource:

Text

Extent:

18 Seiten

Place Term:

Ilmenau

Classification:

Klasse A

Classification:

für Harvesting bereitgestellt

Classification:

52. IWK (2007)

DDC subject of DNB:

004 Data processing Computer sciences

Hosting institution:

Technische Universität Ilmenau, Fakultät für Informatik und Automatisierung