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An ultra-fast on-line microscopic optical quality assurance concept for small structures in an environment of mass production

Aksit, Ishak; Bünger, Kirsten; Fassbender, Alfred; Frekers, Dieter; Götze, Christian; Kemenas, Jürgen

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Category

Conference:
Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau, Faculty of Computer Science and Automation ; 52 (Ilmenau) : 2007.09.10-13
Publisher:
ilmedia GND
Published in:
Computer science meets automation
Vol. 52, 2007, Vol. 2 (11.09.2007), p. 293-296
Original:

Volume:
52, 2007, Vol. 2
Date Created:
11.09.2007
Date Issued:
11.09.2007
PPN:
546147208
Language:
English
Type of Resource:
Text
Extent:
18 Seiten
Place Term:
Ilmenau
Classification:
Klasse A
Classification:
für Harvesting bereitgestellt
Classification:
52. IWK (2007)
DDC subject of DNB:
004 Data processing Computer sciences
Hosting institution:
Technische Universität Ilmenau, Fakultät für Informatik und Automatisierung

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Citation style:
Aksit Dipl. Phys., I., Bünger Dr., K., Fassbender, A., Frekers Prof. Dr., D., Götze Dr., C., Kemenas, J., Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau, F. of C.S., Automation, (Ilmenau), ., 2007. An ultra-fast on-line microscopic optical quality assurance concept for small structures in an environment of mass production. Computer science meets automation: 52. IWK, Internationales Wissenschaftliches Kolloquium ; proceedings ; 10 - 13 September 2007; Volume II, Computer science meets automation: 52. IWK, Internationales Wissenschaftliches Kolloquium ; proceedings ; 10 - 13 September 2007; Volume II 52, 2007, Vol. 2, 293–296.
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