An ultra-fast on-line microscopic optical quality assurance concept for small structures in an environment of mass production

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Aksit Dipl. Phys., I., Bünger Dr., K., Fassbender, A., Frekers Prof. Dr., D., Götze Dr., C., Kemenas, J., Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau, F. of C.S., Automation, (Ilmenau), ., 2007. An ultra-fast on-line microscopic optical quality assurance concept for small structures in an environment of mass production. Computer science meets automation: 52. IWK, Internationales Wissenschaftliches Kolloquium ; proceedings ; 10 - 13 September 2007; Volume II, Computer science meets automation: 52. IWK, Internationales Wissenschaftliches Kolloquium ; proceedings ; 10 - 13 September 2007; Volume II 52, 2007, Vol. 2, 293–296.
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