New demands on inspection planning and quality testing for micro- and nanostructured components

The development and control of more and more complex and extensive technical systems yields to measurement-technology requirements in an increasing degree. These requirements can not be met with the exclusive operation mode of a single-sensor measuring instrument because in most instances multifarious and multistructured measuring quantities are existing on one device under test. The aim of this paper is to discuss new problems of inspection planning arising from the improvement in measurement technology. Essential demands, ideas and conceptual approaches to multistructured quality inspections will be presented.